一體集成液體源汽化器
Bronkhorst? SW-200 VDM 適用于準(zhǔn)確的蒸汽流輸送,工作壓力在真空到10 bar之間,可混合最大流量 120 g/h H2O (320 g/h IPA) 和最大流量 10 ln/min載氣。VDM集成了Bronkhorst? CEM系統(tǒng)和其他組件!除了氣體、液體流量控制器和溫控蒸發(fā)器,該模塊還具有集成電源和顯示器(1.8″TFT) 和控制功能。此外,可選提供本地或遠(yuǎn)程跟蹤加熱溫度控制。
技術(shù)參數(shù)
| 測(cè)量控制系統(tǒng) |
| Ambient temperature max |
5?… 40?°C |
| Max. heating temperature |
200?°C |
| Heater capacity |
100 W |
| 機(jī)械部件 |
| Material (wetted parts) |
Stainless steel 316L or comparable |
| Pressure rating (PN) |
10?bar g |
| Process connections |
Gas and liquid inlet: compression type or face seal couplings;
Vapour outlet: 1/4″ tube (other options on request) |
| Seals |
Viton?/Kalrez?; other on request |
| Purge outlet |
1/8″ OD compression type or 1/8″ face seal male |
| Plunger |
Kalrez?; other on request |
| Display |
1.8″ (TFT technology) |
| Mains supply inlet |
IEC 60320-1/C20 male socket with on/off switch, 230 V / 115 V; 50 Hz / 60 Hz |
| 電氣性能 |
| Max. power consumption |
max. 250 VA;
add 300 VA for optional tracing controlVac |
| Electrical connection |
FLOW-BUS (2 x RJ45 connector) or RS232 (1 x 9-pin sub-D connector);
Optional: Pt100-connection (1 x 4-pin M12 male, a-coded);
Optional: IEC 60320-2-2/C13 female tracing outlet |
技術(shù)參數(shù)如有變更,恕不另行通知。
備注:VDM系統(tǒng)配備Bronkhorst熱式或科氏質(zhì)量流量計(jì)/控制器以實(shí)現(xiàn)氣體和液體流量控制。
更多資料
| Brochures |
| VDM brochure |
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| Manuals |
| Manual Vapor Delivery Module |
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| Dimensional drawing |
| Dimensional Drawing SW100-SW200 |
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